Trimethylsilane
Product Description
| Product | Trimethylsilane |
| CAS | 993-07-7 |
| Formula | C3H10Si |
| Synonym | Silane, trimethyl-, 2-Methyl-2-silapropane, (CH3)3SiH, Trimethylsilane, 2-Methyl-2-silapropane, 3MS, Silane, trimethyl-, TMS |
Typical Product Specifications
| Molecular weight | 74.20 |
| InChI | 1S/C3H10Si/c1-4(2)3/h4H,1-3H3 |
| Notes | Trimethylsilane uses and applications include: Reducing agent; forms trimethylsilylalkanes from olefins; plasma treatment of surfaces; for PECVD of protective coatings and low K dielectronic and barrier layers in damascene metallization Suggested storage of Trimethylsilane: Handle only in sealed purged systems; store cylinders above 55 C away from direct sunlight, precipitation, mech. damage |
| Class | Specialty Chemicals |
| Function | Reducing Agent |
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