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Trimethylsilane

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Product Description

PRODUCT

Trimethylsilane

CAS #

993-07-7

SYNONYM

Silane, trimethyl-; 2-Methyl-2-silapropane; (CH3)3SiH;Trimethylsilane;2-Methyl-2-silapropane; 3MS; Silane, trimethyl-; TMS

FORMULA

C3H10Si

Product Specifications

MOLECULAR WEIGHT

74.20

INCHI

1S/C3H10Si/c1-4(2)3/h4H,1-3H3

INCHIKEY

PQDJYEQOELDLCP-UHFFFAOYSA-N

NOTES

Trimethylsilane uses and applications include: Reducing agent; forms trimethylsilylalkanes from olefins; plasma treatment of surfaces; for PECVD of protective coatings and low K dielectronic and barrier layers in damascene metallization
Suggested storage of Trimethylsilane: Handle only in sealed purged systems; store cylinders above 55 C away from direct sunlight, precipitation, mech. damage

FUNCTIONS

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