Silane, trimethyl-; 2-Methyl-2-silapropane; (CH3)3SiH;Trimethylsilane;2-Methyl-2-silapropane; 3MS; Silane, trimethyl-; TMS
Trimethylsilane uses and applications include: Reducing agent; forms trimethylsilylalkanes from olefins; plasma treatment of surfaces; for PECVD of protective coatings and low K dielectronic and barrier layers in damascene metallization Suggested storage of Trimethylsilane: Handle only in sealed purged systems; store cylinders above 55 C away from direct sunlight, precipitation, mech. damage
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